Marc Madou Fundamentals Of Microfabrication.epub
Marc Madou Fundamentals of Microfabrication.epub
Fundamentals of Microfabrication is a book by Marc J. Madou, a professor of mechanical and aerospace engineering at the University of California, Irvine. The book covers the science and technology of miniaturizing structures and devices to the micro and nanoscale, with applications in microelectronics, microelectromechanical systems (MEMS), biotechnology, and nanotechnology.
The book was first published in 1997 by CRC Press, and has been updated in two subsequent editions, in 2002 and 2011. The book is widely used as a textbook and reference in the field of microfabrication, and has been translated into several languages, including Chinese, Japanese, Korean, and Spanish.
The book consists of three parts: Part I introduces the basic concepts and principles of microfabrication, such as scaling laws, materials properties, lithography, etching, deposition, bonding, and packaging. Part II describes the various methods and techniques of microfabrication, such as photolithography, electron beam lithography, ion beam lithography, soft lithography, micromachining, electroplating, electroforming, molding, embossing, printing, self-assembly, and nanofabrication. Part III discusses the applications and challenges of microfabrication in different domains, such as microelectronics, MEMS, microfluidics, biosensors, bioMEMS, nanoelectronics, nanophotonics, nanomagnetics, and nanobiotechnology.
The book is praised for its comprehensive and accessible coverage of the field of microfabrication, with numerous examples, illustrations, tables, charts, and exercises. The book also provides historical and current perspectives on the development and trends of microfabrication. The book is suitable for undergraduate and graduate students, researchers, engineers, and professionals who are interested in learning about the science and technology of miniaturization.
The book is available in both print and electronic formats. The electronic format can be downloaded as an epub file from various sources on the internet. One such source is [the Internet Archive], where the second edition of the book can be found for free download. Another source is [Taylor & Francis], where the third edition of the book can be purchased or rented. The third edition can also be accessed from [the Internet Archive] for free.